Curvature Dependent Electrostatic Field in the Deformable MEMS Device: Stability and Optimal Control
نویسندگان
چکیده
منابع مشابه
Integrated Modeling and Control of Electrostatic MEMS, Part I: Modeling
We present an integrated approach to modeling and control of electrostatically-actuated MEMS. The model consists of a set of fixed or movable electrodes, each coupled to the others through a resistor and capacitance, and to ground through a capacitance and a voltage or current source. This formulation incorporates movable structures, control electrodes, sense electrodes, and parasitic capacitan...
متن کاملSymmetry and Symmetry Breaking in Electrostatic MEMS
The use of electrostatic forces to provide actuation is a method of central importance in microelectromechanical systems (MEMS) and is of growing importance in nanoelectromechanical systems (NEMS). The study of electrostatic actuation has led to numerous interesting experimental, theoretical, and numerical results. Yet, surprisingly, even simple electrostatically actuated systems have secrets t...
متن کاملDynamics and Touchdown in Electrostatic MEMS
Perhaps the most widely known nonlinear phenomena in nanoand microelectromechanical systems is the “pull-in” or “jump-to-contact” instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state configuration of the device where mechanical members remain separate. This instability affects the design of many devices. It may...
متن کاملPrecise open-loop control of MEMS deformable mirror shape
A new method is introduced for predicting control voltages that will generate a prescribed surface shape on a deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm am...
متن کاملElectrostatic Operation and Curvature Modeling for a MEMS Flexible Film Actuator
In this paper we develop a mathematical model to simulate the actuation of a multilayer metallic strip. In the first step of the model development, we employ the theory of Judy [4] and Timoshenko [5] to quantify the radius of curvature in the unimorph due to differing thermal coefficients in the constituent materials. The resulting radius of curvature is subsequently used to compute the voltage...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Communications in Applied and Industrial Mathematics
سال: 2020
ISSN: 2038-0909
DOI: 10.2478/caim-2020-0003